Statistical Analysis of Single-Order Diffraction Grating with Quasi-Random Structures

Single-order diffraction gratings with quasi-random structures are effective optical elements in suppressing harmonics contamination. However, background intensity fluctuations introduced by may affect the measurement of spectra and lack quantitative description. A unified theoretical method is provided to describe arbitrary distribution functions an number microstructures. The effect microstructures on level evaluated. This work provides important guidance for design optimization single-order gratings, which attractive spectral analysis monochromator applications synchrotron beam lines.